Age-based double EWMA controller and its application to CMP processes
作者：
Chen, A*;Guo, RS
通讯作者：
Chen, A
作者机构：
Natl Taiwan Univ, Grad Inst Ind Engn, Taipei 106, Taiwan.
Natl Taiwan Univ, Dept Ind Management & Business Adm, Taipei 106, Taiwan.
通讯机构：
Natl Taiwan Univ, Grad Inst Ind Engn, Taipei 106, Taiwan.
语种：
英文
关键词：
CMP process,EWMA,Run-by-run control
期刊：
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
ISSN：
0894-6507
年：
2001
卷：
14
期：
1
页码：
11-19
摘要：
In the originally proposed run-by-run control scheme, the EWMA statistic is used as an estimate of the process deviation from its target. However, the controller based on the EWMA statistic is not sufficient for controlling a wearing out process. The PCC controller has been thus proposed to enhance the run-by-run controller capability. In this paper, we first reexamine the fundamentals of the PCC formulations and propose an adjustment that is advantageous in controlling processes subject to both random shifts and drifts, The adjusted PCC controller is then further refined to take into account the process age, This age-based double EWMA scheme is then applied to the CMP pr...
